Abstract
AbstractThe authors developed a coating concept based on amorphous Si/C/N coatings, with promising high temperature properties. Due to a graded coating design, the adhesion, the coating hardness as well as the coefficient of friction were optimized. The coatings showed excellent high temperature stability against chemical decomposition, structural changes and surface oxidation up to 1 350 °C. To allow the deposition of coatings with a certain chemical composition, a numerical relationship between the composition of the coatings and the deposition parameters was established.
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