Development of Functional Metallic Glassy Materials by FIB and Nanoimprint Technologies

Abstract

Patterning techniques are very important in many areas of modern science and technology including applications. Production of micro- and nano-sized periodical structures has been intensively studied in the last years in order to generate one-, two-, and three-dimensional periodical structures in metals, polymers, and ceramics. The process of patterning commonly involves many individual steps before obtaining the desired structure. In general, a pattering method consists of the following elements: formation of a mask or muster, choice of transfer medium or replications of patterns, and choice of resist, which is usually a functional material capable of serving as the resist. Metallic glass is one of the promising materials for such a purpose. Recently, glassy alloys attracted much attention as imprinting materials because they soften on heating similar to polymers, but on subsequent cooling retain high hardness at room temperature and demonstrate good corrosion resistance [1]. It has been reported that three-dimensional structure with several tens or hundreds of nanometer could be prepared using Pt-, Zr-, Au-based glassy alloy ribbon and Zr-based glassy alloy in bulk form [2–5] or in a thin film form [6]. In the present chapter we discuss usage of metallic glasses for nanoimprinting and other similar processes.