Abstract

We have developed a fast scanning microscopic X-ray absorption fine-structure (XAFS) measurement system using a 100–300 nm focused X-ray beam at the BL39XU nano-scale analysis station at SPring-8. This system provides two-dimensional XAFS images constructed from X-ray fluorescence (XRF) images measured by fast continuous 2-dimensional scanning at all XAFS measurement energies. High-quality XAFS spectra at each position were obtained by correcting shift in the XRF images. We applied our proposed method to measuring single catalyst particles, and succeeded in measuring the microscopic x-ray absorption near-edge structure (XANES) images that were 2–4 μm square with a spatial resolution of 300 nm.

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