Abstract

This paper presents the development of an innovative electrohydrodynamic (EHD) ion‐drag micropump for circulating liquid nitrogen in a cryogenic cooling loop. Two micropumps with different electrode designs were tested in this study. Their electrode arrays are composed of multi‐stages of saw‐tooth emitters and planar collectors electroplated on alumina substrates. The pumps had electrode spacings of 20 and 50 μm, respectively, for the distance between electrodes in a pair and 80 and 200 μm, respectively, for the distance between electrode pairs. The pump with closer electrode spacing produced a mass flow rate of twice the other pump at half the applied voltage. This improvement in performance is due to the closer electrode spacing, which allows the incorporation of more electrode pairs in a given pump size. The required voltage is also lowered, since the electric field is inversely proportional to the electrode spacing.

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