Development of electrode structure for acoustic delay lines by using inject printing method

Andrey Smirnov,Vladimir Kolesov,Iren Kuznetsova,Vladimir Anisimkin,P Yermolov

doi:10.1051/itmconf/20193007005

Abstract

The results concerning to study of possibility to produce electrode structure of acoustic delay lines by using inject printing method are presented. The investigation of morphologic and structure characteristics of electrode structure produced has been carried out. The possibility of excitation of plate acoustic waves characterized by high value of electro-mechanical coupling coefficient by such acoustic delay lines has been demonstrated.

Highlights

It should be noted that in recent years there has been a surge in interest in the possibility of creating printed electronics in order to improve operational characteristics and expand the functionality of the developed devices [1]
It is possible to consider InkPrint technology as a replacement for lithographic methods that are widely used in silicon electronics
This work shows the possibility of using the inkjet printing method to create acoustic delay lines on a lithium niobate substrate

Summary

Introduction

It should be noted that in recent years there has been a surge in interest in the possibility of creating printed electronics in order to improve operational characteristics and expand the functionality of the developed devices [1]. The InkPrint process can be carried out at room temperature while it is potentially suitable for the production of large-area electronic components [6]. This technology makes it possible to create high-performance and simple thin-film solar cells, and it is already used for printing radio-frequency identification tags, components of sensors, antennas, and batteries [7,8,9]. It is possible to consider InkPrint technology as a replacement for lithographic methods that are widely used in silicon electronics. This work shows the possibility of using the inkjet printing method to create acoustic delay lines on a lithium niobate substrate

Sample preparation

Investigation results