Development of dynamic 3-D surface profilometry using stroboscopic interferometric measurement and vertical scanning techniques

Abstract

The main objective of this technical advance is to provide a single optical interferometric framework and methodology to be capable of delivering both nano-scale static and dynamic surface profilometry. Microscopic interferometry is a powerful technique for static and dynamic characterization of micro (opto) electromechanical systems (M (O) EMS). In view of this need, a microscopic prototype based on white-light stroboscopic interferometry and the white light vertical scanning principle, was developed to achieve dynamic full-field profilometry and characterization of MEMS devices. The system primarily consists of an optical microscope, on which a Mirau interferometric objective embedded with a piezoelectric vertical translator, a high-power LED light module with dual operation modes and light synchronizing electronics unit are integrated. A micro cantilever beam used in AFM was measured to verify the system capability in accurate characterization of dynamic behaviours of the device. The full-field second-mode vibration at a vibratory frequency of 68.60 kHz can be fully characterized and 3–5 nm of vertical measurement resolution as well as tens of micrometers of vertical measurement range can be easily achieved.