Development of diffractive optical elements with low surface roughness by direct laser writing

Abstract

A novel method of forming the phase diffractive optical elements (DOEs) by direct laser writing in thin films of aluminum was presented. The quality of the writing process in aluminum films were investigated depending on the parameters of magnetron sputtering process. This method of phase diffraction optical elements forming substantially reduces the time, fabrication steps, costs of production and significantly improves the quality of the elements in comparison with traditional methods.