Development of Chipping-Free Dicing Technology Applying Electrophoretic Deposition of Ultrafine Abrasives

Abstract

Summary It is very important to decrease the amount of chipping in the dicing process of brittle materials for the reduction of material loss and the improvement of surface integrity in the production of optical and electrical components. The use of ultrafine abrasives reduces the grain depth of cut which results in the minimization of subsurface damage. Thus, a new dicing technology has been developed by applying electrophoretic deposition of ultrafine abrasives. During the process, the abrasives cohered around a conductive thin blade used as the anode in an electric field and polished the side surfaces of grooves. Consequently, chipping-free dicing was accomplished and an optically smooth surface was obtained on the side surfaces of the groove.