Development of autonomous maintenance implementation framework for semiconductor industries

Abstract

Total productive maintenance (TPM) is one of the maintenance strategies that aim to increase availability and reliability of production machines/equipment. The key to TPM success is the development of autonomous maintenance (AM) practice. The AM refers to human capital development among operators supported by technicians and engineers to perform easy daily maintenance activities aside from planned maintenance. This paper presents the implementation process of AM in a semiconductor company in Malaysia. An AM implementation framework is developed based on four systematic stages: AM initial preparation, AM training and motivation, AM five-step execution and AM audit. The framework is implemented in one of the production lines identified as the most critical area in the company chosen as the case study. The findings based on the developed AM framework are reported in this paper.