Development of an Optical Heterogeneity Evaluation System Using Phase-Shift Digital Holography

Abstract

The nondestructive, non-contact, three-dimensional evaluation of optical glass has been important to the manufacturing of high-precision optical components. In order to achieve high-precision nondestructive evaluation of optical heterogeneity, we develop a versatile evaluation system using the parallel phase- shift digital holography, which enables measurements of the optical path differences at a nanometer-scale resolution. The amplitude and phase distributions of the object wave can be reconstructed directly from a single hologram by using the parallel phase-shift digital holography system. The optical heterogeneity of a sample is determined quantitatively based on the distribution of the optical path differences quantitatively.