Development of an on-machine measurement system with chromatic confocal probe for measuring the profile error of off-axis biconical free-form optics in ultra-precision grinding

Abstract

Ultra-precision grinding of large-scale free-form optics made of hard brittle material is faced with several thorny problems, such as the grinding process is complex, hard to estimate the wear of the grinding wheel and the on-machine measurement technique of profile error is immature, which seriously affects the rapid convergence of profile accuracy. The on-machine measurement of profile error can effectively avoid the re-installation error introduced into the compensation period, and then the effectiveness and machining efficiency of compensation grinding are enhanced. Therefore, we developed an on-machine measurement system with a chromatic confocal probe for measuring the profile error of off-axis biconical free-form optics in ultra-precision grinding. First, the on-machine measurement system was developed on a 4-axis ultra-precision machine tool, and the scanning principles and position calibration were studied. Then, the scanning strategy was systematically researched, which included the centering approach, scanning path planning, scanning parameter calculation, and the evaluation principle of profile error. Finally, the on-machine measurement experiments were carried out on the off-axis biconical free-form optics with a width of 220 mm and height of 100 mm. The sub-micron variation range of measurement results is achieved by measuring the full-aperture profile error under different sampling parameters. The developed on-machine measurement system and scanning strategy can significantly improve the profile accuracy and machining efficiency of the large-scale free-form optics made of hard brittle material, and reduce the production cost.