Development of an in situ ion irradiation scanning electron microscope

Abstract

An in situ ion irradiation scanning electron microscope (I3SEM) has been developed, installed, and integrated into the Ion Beam Laboratory at Sandia National Laboratories. The I3SEM facility combines a field emission, variable pressure, scanning electron microscope, a 6 MV tandem accelerator, high flux low energy ion source, an 808 nm-wavelength laser, and multiple stages to control the thermal and mechanical state of the sample observed. The facility advances real-time understanding of materials evolution under combined environments at the mesoscale. As highlighted in multiple examples, this unique combination of tools is optimized for studying mesoscale material response in overlapping extreme environments, allowing for simultaneous ion irradiation, implantation, laser bombardment, conductive heating, cooling, and mechanical deformation.