Development of an in-air RBS technique using a metal capillary

Abstract

We have developed a simple Rutherford backscattering spectroscopic (RBS) method to analyze sample depth profiles in air. To avoid excessive energy loss of projectile ions in air, we have used a 3 MeV proton beam extracted into air with a metal capillary. Using this capillary, we were able to extract a sufficiently large proton beam current to perform in-air RBS and in-air PIXE without requiring any window, such as a thin film, between a vacuum chamber and air. We have validated our technique by analyzing the depth profiles for Au foils of various thicknesses, 0.25, 0.75, and 2.5 μm. A comparison of the experimental results with a simple theoretical calculation indicates that this technique is useful for analyzing the depth profile of any specimen in air.