Abstract
An elastic recoil detection analysis (ERDA) system in air for hydrogen analysis was developed in the Wakasa Wan Energy Research Center. This system uses a thin silicon–nitride window to separate the air and vacuum regions, and the beam is irradiated through the window. Elements scattered by the beam enter the vacuum region through the same window, and are detected by an ERDA detector located there. The hydrogen sensitivity of the system was investigated by analyzing high molecular films. We used a helium beam and a stopper foil in front of the ERDA detector to ensure that only hydrogen was detected. Hydrogen energy spectra for the high molecular films and background were obtained.
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