Abstract
An electrohydrodynamic (EHD) micropump to generate oscillating flow is newly developed and experimentally tested using an arrangement of thin stainless steel wires. A working fluid is accelerated from the charged electrode to the ground electrode by a high electric field. The electric body force responsible for this acceleration is primarily the Coulomb force. To increase the electric filed, the distance between the charged and ground electrodes is 0.2 mm. The size of the present EHD pump is 24×30×7.8 mm. Since the pressure increases with the increase in the number of the electrode pairs, a pumping channel fabricated in this EHD pump is bent in parallel so as to increase the number of electrode pairs. This channel has the dimensions of 24×48×0.9 mm, in which ten pairs of electrodes are fabricated. The maximum static pressure generated by the present EHD pump is approximately 550 Pa at an input of DC 1 kV, and the maximum flow rate is 4.3 ml/min at the unloaded condition. In order to generate symmetric oscillating flows, alternating voltage is applied. The present EHD pump is demonstrated to successfully generate symmetric oscillating flows at low frequencies (0.01 Hz ∼ 0.05 Hz)
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