Abstract
A micro Coordinate Measuring Machine (CMM) with the measurement volume of 50 mm × 50 mm × 50 mm and measuring accuracy of about 100 nm (2σ) has been developed. In this new micro CMM, an XYZ stage, which is driven by three piezo-motors in X, Y and Z directions, can achieve the drive resolution of about 1 nm and the stroke of more than 50 mm. In order to reduce the crosstalk among X-, Y- and Z-stages, a special mechanical structure, which is called co-planar stage, is introduced. The movement of the stage in each direction is detected by a laser interferometer. A contact type of probe is adopted for measurement. The center of the probe ball coincides with the intersection point of the measuring axes of the three laser interferometers. Therefore, the metrological system of the CMM obeys the Abbe principle in three directions and is free from Abbe error. The CMM is placed in an anti-vibration and thermostatic chamber for avoiding the influence of vibration and temperature fluctuation. A series of experimental results show that the measurement uncertainty within 40 mm among X, Y and Z directions is about 100 nm (2σ). The flatness of measuring face of the gauge block is also measured and verified the performance of the developed micro CMM.
Highlights
With the fast development of Micro Electro Mechanical Systems (MEMS) and micromachining technology, micro-parts at micro scale are developed and used rapidly, such as micro gears, micro motors and micro sensors, etc
In order to measure those microparts, some novel Coordinate Measuring Machine (CMM) with accuracy of tens of nanometers have been developed [1], such as the Molecular Measuring Machine developed by the National Institute of Standards and Technology (NIST) [2], the High-Precision Micro-CMM developed by the University of Tokyo and the National Institute of Advanced Industrial Science and Technology (AIST) [3], the special CMM
Developed by the Physikalisch-Technische Bundesanstalt (PTB) [4], the small-sized CMM developed by the National Physical Laboratory (NPL) [5], the Nanopositioning and Nanomeasuring Machine (NPMM) developed by the Ilmenau University of Technology [6,7,8], etc
Summary
With the fast development of Micro Electro Mechanical Systems (MEMS) and micromachining technology, micro-parts at micro scale are developed and used rapidly, such as micro gears, micro motors and micro sensors, etc These micro-parts have sizes ranging from sub-millimeter to tens of millimeters, and their local geometrical features need to be measured at sub-micrometer accuracy. CMMCMM with zero beenhas developed which includes includes design such as the self‐made system, thesystem metrological and some new some designnew ideas, such ideas, as the self-made probe system,probe the metrological and thesystem co-planar the co‐planar stage It has achieved the measuring uncertainty with mm of about nm (2 ). Thesample sampleisismounted mountedon ona amoving movingtable tableofofthe the3D They can transfer the deadweight of the stage to the granite base.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
