Abstract
A prototype of AFM (Atomic Force Microscope) tweezers will be presented. In order to combine the functions of nano objects manipulation with AFM observation, we have developed a tweezers-type AFM probe device using micromachining technology. The device has two thin wedge-type arms shaped by anisotropic etching of silicon and local oxidation of silicon in techniques; one plays the role of an AFM probe, and another plays that of a manipulation probe in cooperation with manolithically fabricated micro actuators. The AFM tweezers will offer new research methods in bio/nano technology.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.