Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors

Abstract

We developed achromatic full-field hard X-ray microscopy on the basis of advanced Kirkpatrick-Baez mirrors consisting of four total-reflection mirrors. The microscope system consists of advanced Kirkpatrick-Baez mirrors as an objective, Kirkpatrick-Baez mirrors as a condenser and an X-ray CCD camera. The performance of the system was investigated using a Siemens star chart with a minimum resolution of 50 nm at BL29XUL of SPring-8 at 10 keV. As a result, a spatial resolution of ~150 nm was achieved. Also, no chromatic aberration was confirmed by taking images at an X-ray energy from 8 to 11.5 keV.