Abstract
Abstract Atomic force microscopy (AFM) is one of the useful tools in the fields of nanoscale measurement and manipulation. High speed scanning is one of the crucial requirements for live cell imaging and soft matter characterization. The scanning speed is limited by the bandwidth of the AFM’s detection and actuation components. Generally, the bandwidth of a traditional scanner is too low to conduct the live cell imaging. This paper presents a simple and integrated compact home-made AFM for high speed imaging. To improve the bandwidth of the scanner, a parallel kinematics mechanism driven by piezoelectric actuators (PZTs) is proposed for the fast positioning in the X, Y and Z directions. The mechanical design optimization, modeling and analysis, and experimental testing have been conducted to validate the performance of the proposed scanner. A number of experimental results showed that the developed scanner has the capability for broad bandwidth with low coupling errors in the actuation directions. A hybrid control strategy including feedforward and feedback loops has been designed to significantly improve the dynamic tracking performance of the scanner and a field programmable analog array (FPAA) system is utilized to implement the control algorithm for excellent and stable tracking capability. Further, a number of high speed measurements have been conducted to verify the performance of the developed AFM.
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