Abstract
A conductive direct-write process of multilayered coils for micro electromagnetic generators is proposed. This novel approach of using silver ink to form the conductive structures largely reduces the fabrication complexity, and it provides a faster alternative to the conventional semiconductor methods. Multi-layered coils with insulation were accurately layered on a micromachined cantilevered diaphragm by a dispenser. Coils several layers thick could be used to increase the power output and double coils were separated by a layer of insulation. Six prototypes, all capable of efficient conversion of vibrational energy into electrical energy, were fabricated. The experimental results, which include measurements of the electromotive force and power output, are presented. Prototypes with two coils and thicker conducting layers had less resistance and the power output was much more than that of a single-coil unit. This generator can produce 82 nW of power at a resonance frequency of 275 Hz under 5 g excitation.
Highlights
The miniaturization of consumer electronics and mechanical structures has been receiving a great deal of attention for a considerable time
Extensive fabrication techniques have been developed for complex structures, including gray-scale lithography, reactive ion etching, LIGA, and electron beam lithography [1,2,3]
Lee proposed a micro-stereolithography process for the fabrication of metal microstructures that used a low-viscosity metal powder suspension sintered by a focused laser beam [4]
Summary
The miniaturization of consumer electronics and mechanical structures has been receiving a great deal of attention for a considerable time. Fabrication techniques have been developed recently for the fabrication of conductive structures with electrical functionality, which include micro-stereolithography [4], micro-laser-sintering [5], inkjet printing [6,7], and continuous writing [8,9,10]. These offer dramatic advantages over typical methods in terms of low cost, large area, and a quick processing time, but still suffer from some limitations with respect to the structure and material. Regenfuss realized structural features and performed laser micro-sintering with sub-micrometer grained metal powders, where the challenge was the high temperature and porosity [5] These techniques often require expensive equipment or costly photopolymers
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
