Abstract
In this study, we propose a magnetically driven micro-mirror, constructed using negative photoresist SU-8 containing magnetic particles, as a magnetic actuator and torsion bar structure. Because the magnetic polymer composite uses thick negative photoresist SU-8 as the main material, the micro-mirror is simply fabricated in just a few steps by conventional photolithography and deep reactive ion etching. A fabricated prototype of the micro-mirror, which is magnetically driven by using an external magnetic field, is shown to deflect with two-dimensional optical deflection angles of 6.5 and 12.5°. Moreover, Lissajous scanning motion of the fabricated mirror is achieved.
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