Abstract
In this paper, we have developed transformable-sheet electrodes for a capacitively coupled microwave plasma (CCMP) and diagnosed parameters of the CCMP in air, such as the rotational temperature of N <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> (400-600 K at 80-230 torr) and the electron density (approximately 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">13</sup> /cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> at 300 torr). We applied the CCMP to surface modification of polycarbonate to improve the hydrophilic property of the surface. We also performed generation of a homogeneous plasma, which could be of various shapes, developing different transformable-sheet electrodes in air by ac (1.6 kV) at 10 kHz at 3 torr. These results suggested that on-demand plasma processing without an operating gas could be achieved by utilizing transformable-sheet electrode technology.
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