Abstract
A new TOF telescope has been constructed for thin film and surface analysis. The timing system consists of two electrostatic mirror type detectors of Busch design. The detection efficiency of timing stations for very light ions was significantly improved using DLC (diamond like carbon) foils coated with LiF instead of the conventionally used carbon foils. Ion energy is measured by a 300mm2 ULTRA ion-implanted silicon detector. For the ERDA measurements with heavy and energetic ion beams, a time-of-flight (TOF) spectrometer is positioned at 37.5°. Spectrometer can be easily moved to 120° backward angle for time-of-flight RBS analysis with low energy beam of light ions. Positioning and fine adjustments of sample orientation are performed with a motorized sample stage. The same spectrometer can be also installed at the ion microprobe scattering chamber for 3D elemental imaging.
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