Development of a Thin-Film Strain Sensor with Reduced Pressure, Temperature and Transverse Sensitivity.

Abstract

In order to measure correctly the strain distribution on sliding surfaces of machines, the strain sensor should react only to the strain to be measured. Thus, the sensor should be insensitive not only to pressure, temperature, transverse strain and must be made to meet requirements regarding small size. In this research, we developed a small sputtered thin-film strain sensor with negligible sensitivity to pressure and temperature by properly proportioning the sensor constituents with a Ni-Cr-Al alloy. In addition, by implementing an L-shaped sensor in an appropriate size, a transverse strain sensitivity of zero was achieved.