Abstract
ABSTRACT A gas pressure distribution calculation method for viscous laminar and intermediate flows is developed. By introducing the pseudo-conductance for viscous laminar flow, linearized equations describing pressure distribution are obtained. In intermediate flow, the pressure distribution is iteratively obtained. The validity of the method is confirmed by demonstrating a pressure in a long-tube flow path with various flow rates. The result smoothly connects theoretical curves of molecular flow and viscous laminar flow between two regions. Then, the calculation method is applied to an actual device and is compared to the measurement. The comparison between the calculation and measurement shows the qualitative agreement and reveals the requirement for a more detailed implementation of the actual conditions.
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