Abstract
We have developed a new type SO2 gas sensor applying a particular inorganic thin film on SAW devices. The sensor consists of twin SAW oscillators of the center frequency of 54 MHz fabricated on LiTaO3 piezoelectric single crystals. One delay line of the sensor is coated with a CdS thin film that selectively adsorbs and desorbs SO2, while the other is uncoated for use as a stable reference. Deposition of CdS thin film has been carried out by the spray pyrolysis method using an ultrasonic nozzle. Mass loading induced by the SO2 gas adsorbed onto the CdS film results in corresponding frequency shifts directly proportional to the gas concentration. The relative change in the frequency of the two oscillators is monitored with a digital signal processing circuit. SO2 sensor properties investigated include selectivity, sensitivity, response time, and repeatability. The sensor shows promising performance as a microsensing tool and is capable of measuring concentrations in air less than 200 parts per billion of SO2.
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