Development of a real-time wave field reconstruction TEM system (II): correction of coma aberration and 3-fold astigmatism, and real-time correction of 2-fold astigmatism.

Abstract

In this study, a function for the correction of coma aberration, 3-fold astigmatism and real-time correction of 2-fold astigmatism was newly incorporated into a recently developed real-time wave field reconstruction TEM system. The aberration correction function was developed by modifying the image-processing software previously designed for auto focus tracking, as described in the first article of this series. Using the newly developed system, the coma aberration and 3-fold astigmatism were corrected using the aberration coefficients obtained experimentally before the processing was carried out. In this study, these aberration coefficients were estimated from an apparent 2-fold astigmatism induced under tilted-illumination conditions. In contrast, 2-fold astigmatism could be measured and corrected in real time from the reconstructed wave field. Here, the measurement precision for 2-fold astigmatism was found to be ±0.4 nm and ±2°. All of these aberration corrections, as well as auto focus tracking, were performed at a video frame rate of 1/30 s. Thus, the proposed novel system is promising for quantitative and reliable in situ observations, particularly in environmental TEM applications.