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Abstract
—A probe system has been developed on the basis of an external ADC/DAC module (ADC is the analog-to-digital converter and DAC is the digital-to-analog converter). Using this system, it is possible to determine all the main plasma parameters of continuous and pulsed gas discharges. A program for the Windows operating system has been developed in C++ to control the probe system. The probe system can be used for diagnostics of plasma devices and can be included in modern microplasma analyzers of gas mixtures.
Highlights
Local diagnostics of nonequilibrium gas-discharge plasmas is the most important experimental stage of plasma physics, which provides a means for determining the plasma potential, as well as the electron concentration, temperature, and distribution function [1–11]
It should be noted that the ideas of probe plasma diagnostics, which consist in measuring the highenergy part of the nonlocal distribution function in the plasma region of the negative glow discharge in a buffer noble gas with impurities, have found application in the development of microplasma analyzers of gas mixtures [11–14]
We note that the Impedans and ESPION systems are sensitive to noise while measuring the highenergy part of the electron energy distribution function (EEDF), which requires the manufacture of special filters and amplifiers for comprehensive diagnostics of the gas-discharge plasma [15, 19]
Summary
Local diagnostics of nonequilibrium gas-discharge plasmas is the most important experimental stage of plasma physics, which provides a means for determining the plasma potential, as well as the electron concentration, temperature, and distribution function [1–11]. We note that the Impedans and ESPION systems are sensitive to noise while measuring the highenergy part of the electron energy distribution function (EEDF), which requires the manufacture of special filters and amplifiers for comprehensive diagnostics of the gas-discharge plasma [15, 19]. If one measures the high-energy EEDF part in the afterglow plasma or in the stationary negative-glow plasma of a glow discharge in pure noble gases or in noble gases with impurities, narrow peaks (maxima) can be formed by electrons produced in Penning ionization reactions and second-kind shocks involving metastable noble-gas atoms [1, 10]:. He(23S1) + O2 → He + O+2 (vn) + e{6.2−7.0 eV}. (13) It can be seen that the results practically coincide, indicating the reliability of the developed probe system
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