Abstract

This paper presents a three degrees of freedom (3-DOF) nano-positioning stage in the plane. In order to apply machining, the stage composes of a parallel kinematic mechanism (PKM) structure with the flexure hinges driven by three piezo-electric actuators to achieve the translations in the X- and Y-axes and rotation in the Z-axis. The design of the stage aims at structural stiffness improvement and miniaturization of the size. The static and dynamic stiffness analysis results are presented to verify the validity of three-DOF motion. The proposed nano-positioning stage has a translational motion of 20 nm and rotational motion of 0.2 arcsec in X-, Y-, and θ-directional motion. Experimental testing has been evaluated to the compensation performance of the developed stage respecting the error of a linear axis. The linear displacement error, horizontal straightness error and yaw error is reduced by 90.8%, 96.5% and 90% respectively.

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