Development of a Parallel Dual-Stage Compliant Nanopositioning System

Abstract

This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a parallel manner by a specially devised A-shaped compliant mechanism, which leads to many excellent performances, such as good resolution and large stroke and broadband. To enhance the closed-loop-positioning capability of the proposed PDCNS, a double-servo cooperative control (DSCC) strategy is specially constructed. The performance of the proposed PDCNS is evaluated by analytical model, finite element analysis, and experimental research. Results show that the first-order resonance frequency of the designed A-shaped compliant mechanism can reach 99.7 Hz. Combined with the designed DSCC, the developed PDCNS prototype is demonstrated to provide a stroke of 1.49 mm and a positioning resolution of ≤50 nm.