Abstract
近年, 電子技術や制御技術の進歩に伴い, 高剛性, 高分解能を持つ位置決めステージが強く要求される. 本研究では, 3個のPZTと3個の変位計を用いた3自由度の超精密位置決めステージを開発した. 主にPZTと変位計の配置を工夫し, 制御システムやステージに関する静的及び動的モデルを提案し, 更に, 実験によりステージの特性を調べ, 提案したモデルの検証などを行った.
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