Abstract
We have developed a new 125KV TEM (Fig. 1). It incorporates an electron gun operable up to 125KV, 3-stage illumination lens system, and 5-stage imaging lens system. Microprocessors are used to control the high voltage, electron optics and vacuum system.In the high voltage system, accelerating voltage is variable from 10KV to 125KV with increments of 100V/step. In the low voltage operation at 10KV and 25KV,the anode to wehnelt distance is automatically controlled for optimum gun brightness. Filament and bias voltage supplies are also precisely regulated to give stable emission currents at all accelerating voltages.Imaging lens system is free of image rotation during magnification change from 100x to 500,000x. In addition, a new image rotation system is built in. This image rotation system utilizes the individual lens data such as rotation angle, focal length, etc. When a required image rotation angle is given, the computer determines excitation condition of each lens for a selected magnification.
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