Abstract

This paper depicts a new electromagnetic planar actuator. It includes a slotless stationary plane annature, orthogonal windings and a wireless mover with two permanent magnets. The planar actuator develops movement over a plane surface as a result of the interaction between the air gap magnetic flux and current established through the orthogonal multiphase windings of the annature circuit The actuator was analysed by means of the finite element method The actuator can be used in mechatronic systems that require movement on a plane in two directions, e.g. semiconductor wafers and printed circuits movers, and pieces machined by nwnerically controlled (NC) machines.

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