Development of a New Double Tilt Rotation TEM Specimen Holder

Abstract

The analytical transmission electron microscope is one of the most powerful instruments today for materials characterization. The interaction of the electron beam with the specimen provides immediate visual and compositional information of the structure of materials. Improvements in optics, vacuum technology, emitter and goniometer design have made sub-2Å compositional imaging a standard technique.Side-entry, multifunctional specimen holders compatible with new goniometer designs have been developed to provide an extended tilt range for tomographic applications. Planar features within a TEM specimen are most easily studied if the specimen is first rotated until the planar feature is aligned parallel to the main tilt axis of the specimen holder. Typically this requires manual removal of the specimen for reorientation, subjecting it to potential damage, or the use of motorized specimen rotation in a single tilt holder. Ideally all degrees of freedom of specimen movement should be available to the microscopist through the specimen holder and goniometer.