Development of a New 300kv Ultra-High-Resolution/High Performance Analytical TEM (H-9000)

Abstract

Higher voltage is advantageous for better imaging resolution, better EELS performance and easier microscopy. Generally it results in a large scaled instrument with many associated problems. In the analytical area, there is a possibility of optimum voltage when a total performance balance is taken in consideration. We have developed a 300 KV TEM for both ultra high resolution and high performance analytical applications in view of these parameters. We have suceeded in making the instrument as compact as possible in order that it may improve the cost/performance ratio. We have taken full advantage of our ultra high voltage microscope experiences.Fig. 1 is a general view of the instrument. It is only 2.68m high and the same as conventional 200KV instruments. It consists of a 3-stage illumination and a 5-stage imaging lens system. This design allows the orientation matching for the diffraction pattern and TEM image throughout the entire magnification range.