Development of a miniature clark-type oxygen electrode using semiconductor techniques and its improvement for practical applications

Abstract

A disposable minature Clark-type oxygen electrode has been fabricated using semiconductor techniques. The oxygen electrode consists of: (a) anisotropically etched U- or V-grooves on a (100) silicon substrate as the electrolyte container; (b) a calcium alginate gell containing a 0.1 M KCl electrolyte; and (c) a directly formed gas-permeable membrane. A two-electrode configuration is used with a gold cathode and a gold anode. A novel fabrication process has been developed to allow miniaturization and mass production. Several important factors which influence the oxygen electrode characteristics have been examined. A 90% response time of 10 s is attained. A linear relationship is observed for a wide range of oxygen concentrations at 27°C. 34% of the oxygen electrodes work normally after sterlization in an autoclave. The oxygen electrode can be operated continuously for more than 40 h.