Development of a Microvibration Testing Device : Realizing Microvibrational Reference Waves Smaller than Floor Vibrations

Abstract

To protect precision equipment from microvibrations, it is important to be able to measure the microvibration sensitivities of these machines. As yet, however, no measuring method has been developed. Conventional vibration testing devices cannot generate microvibrational waves under 10 Gal. The authors have developed a microvibration testing device that employs active control technologies. The trial device, which comprises pneumatic-type actuators and a new DSP (Digital Signal Processor) controller, successfully generates sinusoidal microvibrational waves at a magnitude of 0.1 Gal on a vibrating floor. These waves were realized with a noise rate of less than 10%. This paper outlines the developed system and describes some of the experimental results.