Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection

Abstract

This study proposes a novel microprobing system for the surface detection of the side wall of micrometric scale workpieces based on the detection of the local surface interaction force. A spherical tip-shaped glass capillary tube with a micrometric scale diameter was employed as a micro-stylus. To obtain a low measuring force, the local attractive interaction force on the surface of the workpieces was detected by the vibrating micro-stylus and used as the probing trigger signal. The vibration in the main axis direction of the stylus allowed detection of the local surface interaction force in all directions around the stylus shaft. In this paper, the principle and configuration of the developed microprobe are mentioned. Probing detections around the stylus shaft were verified by the surface detection of a pin gauge. Repeatability of the probing by the developed microprobing system was evaluated.