Abstract

This paper presents the development of MEMS gas preconcentrator (GP) for the detection of trace level Volatile Organic Compounds (VOCs). Besides the development of the MEMS gas preconcentrator, we have also worked on the coupling of this preconcentration device with a micro gas chromatograph (μ-GC) for achieving an accurate detection system for gas trace monitoring. Preliminary results have highlighted a significant contribution of the MEMS GP on the μ-GC efficiency and a detection limit below 35ppbv for different vapors like toluene, vinyl acetate monomer, chloroform and methylisobutylketone was reported.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.