Development of a Measurement Device for Micro Gas Flowrate Based on Laminar Flow Element with Micro-Curved Surface

Abstract

The laminar flow meter (LFM) boasts several advantages such as no moving parts, a wide range ratio, high measurement accuracy, quick dynamic response, etc., and is a promising technology for micro gas flow measurement. In order to explore the influence of different curvature radii on curved surface gap LFM, three curved structures with different curvature radii were designed. The computational fluid dynamics method is applied to simulate the flow feature of three structures. The simulated velocity cloud and pressure distribution show that the larger the curvature radius, the more stable the flow of gas medium. The relationship between differential pressure and volume flow was obtained through the test within a flow range of 0~540 sccm. Regression analysis revealed that the volume flow measured by the curved surface LFM had a high linear relationship with the differential pressure. Experimental findings indicate that differential pressure of the structure with a curvature radius of 2 mm was greater than that of other two structures (curvature radius of 6 mm and 3 mm) at the same point. This indicates that adding the number of surfaces can effectively increase the pressure loss, so as to obtain a larger range ratio, but will increase the measurement error.