Abstract

A massively parallelized unstructured-grid plasma simulation code based on a multifluid plasma model has been developed and validated. The code uses a collocated cell-centered finite-volume method and is designed to simulate intermediate low-pressure and atmospheric-pressure (AP) plasma sources with complex machine geometries. One of the novel features of this code is that it is implemented in a highly flexible computational platform named ultrafast massively parallel processing (ultraMPP), which allows straightforward addition and integration of different partial differential equation (PDE) solvers in a self-consistent manner. As to the numerical methods, the Scharfetter–Gummel scheme is adopted to handle the drift-diffusion flux of electrons, whereas the Harten–Lax-van Leer (HLL)-type approximate Riemann solver is used to handle the convection terms of ion momentum equations. For discretization of the diffusion terms in an unstructured grid, the Taylor expansion is used to deal with the effects of nonorthogonality of the cells, and the cell-center gradient is calculated using a least-squares method. The simulation code with a local-field approximation (LFA) was validated for two cases of AP plasmas as well as a case of an argon capacitively coupled plasma generated in a Gaseous Electronic Conference (GEC) reference cell with local mean energy approximation (LMEA) at intermediate low pressure. The simulation results were found to be in good agreement with the previously published experimental and simulation data.

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