Abstract
This work develops a machine for automatically measuring static/dynamic running parallelism for use in the linear guideway manufacturing industry. The automatic static/dynamic running parallelism measurement machine consists of a running parallelism measurement system, a linear motor, a precision granite air-suspension table, and a PC-based human-machine interface. The machine can be used simultaneously to measure the horizontal and vertical running parallelism of a linear guideway and automatically determine its accuracy. The measured parallelism is digitalized and analyzed to detect turning points in the linear guideway. The results concerning the accuracy of the running parallelism are not affected by the measurement platform. Experimental results showed that the standard deviation of the running parallelism measurement system is 0.4 μm and the measuring time is about 10 s for every 1000 mm of length (equal to a measuring speed of 0.1 m/s); this measurement time is 80% shorter than that of a traditional measurement system (which has a maximum speed of 1 m/s, a maximum sampling frequency of 100 kHz, and a maximum measurement length of 2000 mm).
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