Development of a large stroke 3-DOF piezoelectric steering mirror for optical system

Abstract

The steering mirrors and the focusing mechanisms are the key components of the optical system. Traditional steering mirrors driven by voice coil actuator or piezoelectric stack actuator have the disadvantages of short stroke, self-locking difficulty and poor structural reliability. These defects limit the performance of the steering mirrors and make it difficult to be compatible with the focusing mechanism. As a result, additional focusing devices are required in the optical system, which significantly increases the complexity of the system. To simplify the optical system, a large stroke three-degree-of-freedom (3-DOF) piezoelectric steering mirror (PSM) which can realize both light path adjustment and focus adjustment is proposed in this study. Two rotational degrees of freedom of the PSM are used to adjust the light path, and a translational degree of freedom is used to adjust the focus. The screwed-typed piezoelectric actuators (STPAs) are designed to drive the PSM by exciting the travelling wave. The feasibility of the operating principle and reliability of the proposed PSM have been verified by finite element simulation. A prototype of the PSM is fabricated and tested. The experimental results show that the PSM achieves rotational degrees of freedom around the x-axis, y-axis and translational degree of freedom along the z-axis with maximum ranges of ±0.17 rad, ±0.17 rad, and ±10 mm, respectively, meeting the application requirements of the optical systems. The resolutions of the two rotary motions of the PSM are 28 μrad, and 21 μrad, respectively, and that of the translational motion is 0.5 μm. Finally, the position adjustment and focusing operations of the image are demonstrated to validate the potential application of PSM in optical systems.