Abstract
We have developed a four-electrode extraction system for a large area ion source with a wide range of operational conditions, that is, a beam energy of 1–100 keV, a beam current density of 7 nA/cm 2–7 μA/cm 2, and ion source gases of BF 3 or PH 3. Uniformity of the beam profile was less than ± 10% in the 15 × 15 cm 2 area. Control of the beam optics was done by varying the electric field in the extraction region. The optimum field intensity was investigated experimentally and the result agreed quite well with that of the computer simulation. By designing the gap ratio (the distance of the extraction region/the distance of the acceleration region) with a small value, we could control the beam with energies of 1–100 keV by varying the extraction voltage from 0 to 2 kV.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
