Development of a cruciform radio-frequency closed magnetron sputtering source including four sectorial magnetron sputtering discharges for uniform target utilization

Abstract

A rotational cruciform radio frequency magnetron source has been developed by including four sectorial magnetron sputtering discharges for uniform target utilization. The Larmor radius and Hall parameter of electrons are discussed by considering the E × B drift motion of electrons using simulated magnetic field profiles, where the electric field, E, is vertical to the target and the magnetic field, B, is parallel to the target, respectively. Temporal evolutions of ion saturation current Iis, as a measure for the ion flux to the target, are measured by a Langmuir probe at a fixed axial distance of 5 mm from the target and at various radial positions. It is found that the time variation of Iis at each radial position is obtained as predicted from the cruciform magnetron sputtering discharge. The time-averaged ion saturation current profile to the target is in good agreement with the target erosion profile. A maximum target utilization of 78.0% is achieved.