Abstract
In this study, a compound speckle interferometer for measuring three-degree-of-freedom (3-DOF) displacement is proposed. The system, which combines heterodyne interferometry, speckle interferometry and beam splitting techniques, can perform precision 3-DOF displacement measurements, while still having the advantages of high resolution and a relatively simple configuration. The incorporation of speckle interferometry allows for non-contact displacement measurements by detecting the phase of the speckle interference pattern formed from the convergence of laser beams on the measured rough surface. Experiments were conducted to verify the measurement capabilities of the system, and the results show that the proposed system has excellent measurement capabilities suitable for future real-world applications.
Highlights
Speckle Interferometer for PrecisionIn recent years, the rapid development of micro-manufacturing and related industries has led to an increase in demand for precision measurement technologies with long range, high precision and good versatility
Possesses good versatility for simultaneous multi-DOF displacement measurement is of great importance. In response to this need, this study presents a compound speckle interferometer developed by incorporating heterodyne interferometry, speckle interferometry and beamsplitting techniques, allowing for high accuracy, high resolution, non-contact measurement
The non-mirror surface corresponds to the reflective grating of a reflective grating interferometer [9], with multiple beams incident on the rough surface instead of the grating, while the detector measures the intensity of the scattered light
Summary
Speckle Interferometer for PrecisionIn recent years, the rapid development of micro-manufacturing and related industries has led to an increase in demand for precision measurement technologies with long range, high precision and good versatility. Precise, long range positioning ensures uniform and stable processing during the photolithographic procedure, which greatly improves the production quality and yield [1]. Another important quality for precision measurement technologies is non-contact measurement capability, that is the ability to measure displacement or movement without requiring physical contact with the sample, so as not to risk altering or damaging it [2]. If multi-DOF measurement is required, it can only be achieved by altering the existing configuration or by linking multiple sets of interferometer systems [6] This greatly complicates the system configuration, but the build-up of misalignments and positioning inaccuracies tends to have a negative effect on measurement results. The development of a long-range laser interferometer system with non-contact measurement capability, which
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