Abstract
This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage. The 3DOFLM system is composed of a miniature Michelson interferometer (MMI) kit, a wavelength corrector kit, and a miniature autocollimator kit. A low-cost laser diode is employed as the laser source. The motion of the stage can cause an optical path difference in the MMI kit so as to produce interference fringes. The interference signals with a phase interval of 90° due to the phase control are detected by four photodetectors. The wavelength corrector kit, based on the grating diffraction principle and the autocollimation principle, provides real-time correction of the laser diode wavelength, which is the length unit of the MMI kit. The miniature autocollimator kit based on the autocollimation principle is employed to measure angular errors and compensate induced Abbe error of the moving table. The developed 3DOFLM system was constructed with dimensions of 80 mm (x) × 90 mm (y) × 20 mm (z) so that it could be embedded into the nanopositioning stage. A series of calibration and comparison experiments were carried out to test the performance of this system.
Highlights
Long-stroke and nanopositioning planar stages with nanometer-scale resolution and accuracy are essential in various precision systems, such as electronic device manufacturing equipment and scanning-type measuring instruments [1,2]
The stacked-type planar stages suffer from Abbe error, because the reference axis cannot be in line with the functional axis in the working space; the stacked-type planar stages are not proper from the viewpoints of both positioning accuracy and positioning speed
(MMI) kit for displacement measurement and feedback, wavelength correction kit The laser for the kit, and a miniature autocollimator kit for angular error measurement, is mounted onto beam of the 3DOFLM system is in line with the moving axis at the center of the stage
Summary
Long-stroke and nanopositioning planar stages with nanometer-scale resolution and accuracy are essential in various precision systems, such as electronic device manufacturing equipment and scanning-type measuring instruments [1,2]. Commercial laser interferometers, made of He–Ne lasers featuring a long measurement range, fast speed, and nanometric resolution, are widely used for the calibration tool of linear stages Their sizes are too bulky to be embedded into the small nanopositioning stage as a feedback sensor. A novel miniature laser diode interferometer based on the Michelson interferometer principle was, developed for precision displacement feedback in each axis of a nanopositioning stage by the authors’ group [11]. In order to achieve a high-precision closed-loop displacement feedback control of the nanopositioning stage, it is essential to ensure the accuracy of the laser diode wavelength and compensate for the angular-error-induced Abbe error. Sci. 2018, 8, x FOR PEER REVIEW the following displacement and two angular motionsInterferometer of the nanopositioning stage can be detected simultaneously
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