Development of a Center for Advanced Mold/Mask Processes and Applications for the Miniaturization Technologies

Abstract

Abstract : This constitutes the final report for this project during its final no-cost extension period. The primary thrust of this research effort is to develop novel methods for the fabrication of true three dimensional micro- and nano structures. This period of the grant marked the consolidation of several individual projects into mature research areas, the application of the major equipment purchased by the grant toward many of the research thrusts and the purchase of additional equipment. Specifically, the additional equipment purchased with support from the grant are an Atomic Force Microscope (AFM) and a Small Scale Electroplating Station. The ability to electroplate a three-dimensionally varying geometry using multilayer methods allows the realization of electroplated microstructures in an inexpensive and manufacturable fashion. The ultimate objective is to use both electro and electroless deposition techniques to fabricate molds and thereby demonstrate mass production of microstructures with an arbitrary geometric cross-section. In addition to mold fabrication, electrodeposited microstructures can be released from the substrate (using sacrificial technology) to yield unconstrained micro components that can be positioned in a micro assembly using post-processing techniques. Human resource training in microtechnologies at Grambling State University has also been expanded in this grant period.