Abstract
Our research group previously developed an integrated micro-laser Doppler velocimeter only $2.8 \times 2.8$ mm in area and 1-mm thick by minimizing a number of components with multifunctional parts, such as a glass cover with lenses for hermetic sealing and laser collimation, a silicon base for casing, a mirror mount, a laser diode bench, and others. In this paper, by applying a fast Fourier transform analysis to the sensor output, we successfully measured the velocities of plastic, paper, and aluminum objects over a wide velocity range, from 10 $\mu \text{m}$ /s to 10 mm/s, within a 3.3% measurement error, without attaching any scale to the measurement target. We also verified feasible measurement distances for each object and examined how tilt installation error affected the measurements. [2015-0111]
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