Development of 3D imaging systems using ion microbeams

Abstract

Elemental analysis of specimens at the microscale is very important in various fields. To capture a three-dimensional (3D) elemental image, we developed a sequential computed tomography (CT) system comprising particle-induced X-ray emission (PIXE)-micron-CT and PIXE-CT. This system can image samples with sizes ranging from several µm to 1000 µm. We applied this system to capture 3D elemental images of iron (Fe), titanium (Ti) and cesium (Cs) in samples ranging in size from 50 to 100 µm. Ti and Fe were easily measured by both micron-CT and PIXE-CT, and the results obtained were consistent between the two systems.